Low k Dielectrics

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- Lowering the k value of the low-k polyimide:

Kuo, et al. MRS 766, 333, 2003.

Kuo, et al., MRS 766, 333, 2003.

SIMS analysis of film surfaces after various hydrogenation and annealing steps

Chung, et al., ECS Proc. PV 2003-22, 2003.

AFM images of (a) untreated, (b) room temperature 10 min hydrogenated, and (d) 200°C 10 min hydrogenated

Chung, et al., ECS Proc. PV 2002-22, 2003.

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